论文部分内容阅读
Temperature induced structure and optical properties of HfO2 thin films by ellipsometry spectroscopy
【机 构】
：
DepartmentofPhysics,UniversityofScienceandTechnologyofChina,Hefei230026,ChinaCentreforPhysicalExperi
【出 处】
：
第二届全国偏振与椭偏测量研讨会
【发表日期】
：
2016年11期
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