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Effects of Pressure on Microstructure of Diamond-Like Carbon Films Deposited by High Power Pulsed Ma
【机 构】
：
AIST-Chubu, Nagoya, Japan AIST-Tsukuba, Tsukuba,
【出 处】
：
The 17th International Conference on Surface Modification of
【发表日期】
：
2011年3期
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