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5. Study Of Microvias Fabrication On AlN Substrates By Using A Femtosecond Laser

Study Of Microvias Fabrication On AlN Substrates By Using A Femtosecond Laser

来源 :2015台湾物理年会 | 被引量 : 0次 | 上传用户：longlivewebdynpro

【摘 要】

：

　　High thermal conductivity and high electrical resistivity of ceramics make them ideal interposer materials for three-dimensional integrated circuits.

【作 者】

：

曾雅欣 朱慧心 曾勝陽 羅志偉 王智 姜智豪 郭養國 

【机 构】

：

電子物理系,國立交通大學,新竹市,Taiwan化學所,中科院,桃園縣,Taiwan

【出 处】

：

2015台湾物理年会

【发表日期】

：

2015年1期

【关键词】

：

aluminum nitride substrate femtosecond laser microvias 

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　　High thermal conductivity and high electrical resistivity of ceramics make them ideal interposer materials for three-dimensional integrated circuits.

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