Computer Modeling of Inductively Coupled Plasmas: Plasma Chemistry and Feature Profile Simulations f

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：wondercn

【摘要】

：

In this talk,we will explain how to model etching and deposition processes for electronic device fabrication,as applied in Shallow Trench Isolation (STI) and th

【作者】

：

S. Tinck A. Bogaerts

【机构】

：

University of Antwerp, Universiteitsplein 1, 2610 Wilrijk, Belgium

【出处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年期

下载到本地 , 更方便阅读

下载此文赞助VIP

声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架

论文部分内容阅读

In this talk,we will explain how to model etching and deposition processes for electronic device fabrication,as applied in Shallow Trench Isolation (STI) and the simulation results will be compared to experimental data.

其他文献

Resistive Switching Effect for ZnO Hybrid Memory with Metal-oxide Nanocrystals

The hybrid nanocrystal nano-floating gate memory device and the transparent hybrid memoy device with the metal-oxide nanocrystals have been proposed to improve

会议

吸烟引起肺细小动脉病理改变的图像定量分析

为更深层次的了解吸烟对肺细小动脉的影响，在原６００例肺标本中，按年龄及吸烟指数分成２１分组的观察基础上，每分组不加选择地取４例，共８４例，每例２张切片，用图像分析仪测试切片中，所有的较圆整的＜２００μ

期刊

图像定量分析细动脉形态学基础血液动力学对比值肺动脉高压血管腔动脉壁无显著性差异图像分析仪

北京九大成熟区域

CBD:北京目前提的 CBD 是在1993年北京城市总体规划确定的基础上,1997年又进行了现状调查和深化研究后形成的。东到西大望路,西到东大桥路。北到朝阳北路,南到通惠河,包括建

期刊

朝阳北路九大东二环东三环金十字中央商务区核心区发展前景城市总体规划辐射区

怎样保护学生视力,防治近视

目前学生体格检查结果表明，近视的发生原因有三：其一，是先天遗传因素所致；其二，是后天环境因素（包括工作、学习强度和时间，用眼卫生注意不当等）所致；其三，是生长发育、体质、营养和健康

期刊

学生视力用眼卫生后天环境因素先天遗传因素生长发育体格检查睫状肌痉挛在校学习时间饮食营养学习方法

Surface exfoliated carbon fiber in wire junction

Carbon-fiber microelectrodes (CFMEs) have been a useful tool for micro devices because of their small size,strength,and good electrochemical properties.In this

会议

Hydrogen plasma induced crystallization of Si∶H thin films by remote inductive coupled plasma source

Hydrogenated microcrystalline silicon thin films (μc-Si∶H) were deposited by remote inductive coupled plasma (ICP) assistant pulsed dc twin magnetron sputteri

会议

A SPECIAL MANUFACTURE OF NANOWIRES WITH HIGH PRECISION AND ITS CONCRETE IMPLEMENT

This paper describes a way to realize the manufacture of nanowires in detail,which would be discussed mainly on the implement methods as well as the specific cr

会议

Subnanometer-scale control of feature size and shape in organic low-k film etch

In technology generation of 10-nm half-pitch and beyond,fluctuation of feature size and shape at subnanometer-scale become an essential factor to determine the

会议

Recent Progress in Research on Dual-frequency Capacitively Coupled Plasma in PSEG

会议

Capacitively Coupled Plasmafloating double probeoptical emission spectroscopy

Effects of Ar plasma treatment on bonding of graphene to metal

Graphene synthesized by chemical vapor deposition was exposed to plasma to examine its effects on the bonding properties of graphene to metal.

会议

Computer Modeling of Inductively Coupled Plasmas: Plasma Chemistry and Feature Profile Simulations f

与本文相关的学术论文