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The preparation and properties of low temperature porcessilbe low refractive index polymethylsilsesquioxane were investigated.Polymethylsilsesquioxane nanoparticles were synthesized by methyltrimethoxysilane(MTMS) and grafted with tetraethoxysilane(TEOS) and fluorosilane.The polymethylsilsesquioxane nanoparticle possesses low refractive index without high temperature baking to generate porosity.