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5. Magnetron plasma-fabricated bioactive titania films for biomedical application

Magnetron plasma-fabricated bioactive titania films for biomedical application

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：cuibo1000

【摘 要】

：

TiO2 films with different anatase/rutile phase composition and nanocrystal size were fabricated by using DC magnetron sputtering deposition on unheated substrates.

【作 者】

：

Xiao Xia Zhong 

【机 构】

：

Key Laboratory for Laser Plasmas(Ministry of Education)and Department of Physics,Shanghai Jiao Tong

【出 处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年9期

【关键词】

：

Magnetron Sputtering Titania Apatite formation Simulated Body Fluid Osteoblast c 

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TiO2 films with different anatase/rutile phase composition and nanocrystal size were fabricated by using DC magnetron sputtering deposition on unheated substrates.

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