MEMS-Based Micro Solid State Drag Force Wind Sensor

来源 :中国微米纳米技术学会第十届学术年会暨第一届国际会议(1st International Conference of th | 被引量 : 0次 | 上传用户:gongwj123
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  A micro solid state drag force wind sensor is presented in this paper.It has advantage of low input voltage,small volume and high sensitivity with high wind velocity and includes two perpendicularly encapsulating cells each of which is used to measure the wind velocity.The model of the designed sensor is shown in Fig.1.The dimension of the single cell is 9mm×8mm×0.35mm and of the wind sensor is 53mm ×Φ20mm.Each cell includes one plate which is 3000μn in length,2500μm in width and 10μm in thickness and two cantilevers with the size of 500μm in length,500μm in width and 10μm in thickness which connect with the plate and silicon substrate.The plate of the single cell is used to receive and sense the drag force of wind.The drag force will cause the deflection of cantilevers when wind flow blows to the sensor.It is known in fluid dynamics that the drag force is proportional to the square of wind velocity.Thus we can get wind velocity by measuring the strain caused by the deflection of the cantilevers and wind direction after perpendicular encapsulating two cells.In the single cell the strain of cantilevers of is measured by forming the platinum resistors on cantilever and the platinum resistors on substrate into Whitestone Bridge the output of which is measured by ADS1256.
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