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讨论了在采用薄膜干涉方法分 (合 )波时 ,其中的关键器件——薄膜干涉滤光片的设计和镀膜监控误差模拟。主要介绍了一个波分复用双通道薄膜干涉滤光片的设计原理、设计过程、滤光片的性能及影响因素分析 ,并进行了假定监控误差下的镀膜过程的模拟。
This paper discusses the design of the thin film interference filter and the simulation error of the coating monitoring error when the thin film interference method is used to divide the (co) wave. The design principle, design process, filter performance and influencing factors of a WDM dual-channel thin film interference filter are mainly introduced, and the simulation of coating process under the assumption of monitoring error is carried out.