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In micro optical electro mechanical systems,the air thickness of a Fabry-Perot cavity is about one wavelength.Therefore,the interference series is less and the reflection phases of the reflectors have much influence on the peak wavelength.The linear relationship between the thickness of an air cavity in a tunable filter and the resonant wavelength is deduced and verified by numerical computation in this paper.The factors influencing the wavelength modulation sensitivity are analyzed.The relationship between the refractive index and number of layers of the reflectors and the linear coefficient is derived.