【摘 要】
：
The "Hands-on access fab" is a 4" and 6" facility that companies can easily access and utilize for their prototyping. The fab is shared with other users and managed with best efforts. The fab will not
【机 构】
：
Innovative R&D Division, Micro System Integration Center, Tohoku University
【出 处】
：
2011传感器与MEMS技术产业化国际研讨会
论文部分内容阅读
The "Hands-on access fab" is a 4" and 6" facility that companies can easily access and utilize for their prototyping. The fab is shared with other users and managed with best efforts. The fab will not make contract development like MEMS foundry. Companies which have not own facility can dispatch their people to operate equipments by themselves. More than 20 companies have used the fab since the opening in November 2011. The fab targets to make barriers of MEMS development smaller.
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