Most MEMS relay/switch studies found in the literature either focus on signal switching applications and logic operation or are oriented toward technology demonstration.Few have addressed the need for a MEMS based relay/switch tailored for power applications.This paper present a novel power MEMS switch with multi-contacts and parallel resists.Electric switching functions are divided into two processes,which are implemented by primary switch and auxiliary switches respectively.Auxiliary switches,which are realized by multi-contacts with resistances connected in series,are paralleled with the primary switch.The series resistances limit each contact current to below the minimum arc discharge current for each arc discharge suppression.Auxiliary switches take on the dynamic process of switch-on and off and transfer the energy of possible arc,while the primary switch takes on the steady process of contact,avoiding any harm from the possible are during the dynamic process and realizing nonarcing switching.MEMS technology provides fully integrated manufacture for the power MEMS switch.