Laser processing represents a significant advancement in the fabrication of high efficiency crystalline silicon solar cell technologies.Highly repeatable chemical and physical modification of silicon wafers and dielectric films at micron-level precision is ideally suited to producing partial rear-contacts via localized dielectric removal and chemical doping.The ability to eliminate high thermal-budget processes and those involving hazardous chemical etchants promises simplified and reduced-cost fabrication of these relatively complex cell designs.This presentation will cover the latest advances in laser processing of crystalline silicon solar cells at the Australian National University.The application of laser tooling technologies ranging from the deep ultraviolet to the near-infrared will be discussed,including laser ablation of thin films and laser doping from custom precursors and dielectric films.In particular,deep ultraviolet laser systems are shown to produce minimal damage in the removal of commonplace dielectric films,while laser doping from atomic layer deposited aluminium oxide films is achieved with both UV and visible laser systems.The application and advantages of these techniques to high-efficiency crystalline silicon solar cell concepts is demonstrated.