Fabrication of gold micro/nanostructures by direct laser writing and chemical etching

来源 :The 4th Advances in Optoelectronics and Micro/nano-optics (A | 被引量 : 0次 | 上传用户:zskarl
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  We report gold micro/nanostmctures fabricated by a new method called lithographically patterned nanostructure by chemical etching (LPNCE).In theLPNCE method,a sacrificial gold layer with 200 nm thickness is sputtered on a silica glass with 25 mm diameter and 1.5 mm thickness.The photoresist layer,composed of pentaerythritol triacrylate (PETA,monomer) and isopropyl thioxanthone (ITX,photoinitiator),is dropped on the gold surface and subsequentlypolymerized via two-photon absorption of 800nm femtosecond laser.
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