【摘 要】
：
Nanoscale TiN-Ag composite films and TiN/Ag multilayers were deposited on the Si (100) and Ti-6Al-4V substrates via multi-target magnetron co-sputtering and sputtering system respectively. The study i
【机 构】
：
Energy & Materials Engineering Centre,College of Physics and Materials Science, Tianjin Normal Unive
【出 处】
：
第十一届全国表面工程大会暨第八届全国青年表面工程学术会议
论文部分内容阅读
Nanoscale TiN-Ag composite films and TiN/Ag multilayers were deposited on the Si (100) and Ti-6Al-4V substrates via multi-target magnetron co-sputtering and sputtering system respectively. The study investigated the comparison of mechanical properties and biocompatibility of TiN-Ag composite films and TiN/Ag multilayers. According to the results of XRD and SEM, doped Ag can promote the crystallization of nitride, including TiN and Ti2N, besides, TiN/Ag multilayers showed significant multilayer structure. The mapping images demonstrated that Ag evenly distributed on the surface of TiN-Ag composite films. Comparing with TiN-Ag composite films, TiN/Ag multilayers displayed smoother surface topography and smaller roughness parameters by analyzing the results of AFM. The hardness and elastic modulus of multilayers were higher than composite films, while, the critical load was opponent because of the fact that Ag embedded in the composite films as a soft metal. The results showed that both of films were changed to be hydrophilic successfully after surface modification of Ti-6Al-4V. Thence, this conversion of materials was beneficial for cell adhesion by observing the SEM images of cell adhesion state. In the biological experiment, the mouse-fibroblast cells (L929) relative cell growth rate of TiN-Ag composite films was higher than TiN/Ag multilayers. Therefore, the biocompatibility of TiN-Ag composite films was better than TiN/Ag multilayers.
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