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CIGS solar cells are the most prominent thin film solar cells with efficiencies comparable to crystalline solar cells.With the TENUIS Ⅱ,the throughput and the cell efficiency could be increased significantly still providing outstanding homogeneities of the buffer layer for a excellent fill factor of your cell.Introducing a new heating concept new parameters e.g heating curves provide options to adapt the process even better to the absorber.The influence of wobbling parameters and process temperature on the deposition rate will be shown.