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Room temperature photoluminescence spectra were achieved from ZnO films post-treated in oxygen plasma with different time.Two emission lines centered at about 387nm and 522nm were observed.As a rule,the UV emission line centered at about 387nm was ascribed to the near band edge emission.The green luminescence centered at 522nm enhanced with the increase of treating time in oxygen plasma.Decrease of Zn-O bond and increase of O-O bond with the increase of treating time could be deduced from the Zn2p and O1s lines measured by X-ray photoelectron spectroscopy.These tendencies were estimated to be due to the increase of oxygen antisites (OZn) in the films induced by the bombardment and implant effects of the oxygen plasma.