【摘 要】
：
Recently it was shown that gaseous accelerated cluster ion beams have some unique advantages in comparison with conventional atomic ion fluxes.One of the distinguishing features of cluster ions is the
【机 构】
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Novosibirsk State University,Novosibirsk,630090,Russia
【出 处】
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29th International Symposium on Rarefied Gas Dynamics(第29届国际
论文部分内容阅读
Recently it was shown that gaseous accelerated cluster ion beams have some unique advantages in comparison with conventional atomic ion fluxes.One of the distinguishing features of cluster ions is the possibility to widely regulate an energy corresponding per one unit of the cluster.
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