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5. Research on Cavity Temperature Measurement Method of Silicon Resonant Accelerometer Based on Integra

Research on Cavity Temperature Measurement Method of Silicon Resonant Accelerometer Based on Integra

来源 :The 6th International Conference on Nanoscience and Technolo | 被引量 : 0次 | 上传用户：baobaob1234

【摘 要】

：

　　In order to improve the temperature stabilities of bias for silicon resonant accelerometer(SRA),a temperature measurement method to measure Temperature in p

【作 者】

：

Jing Zhang Guo-Ming Xia An-Ping Qiu Qin Shi You Bian 

【机 构】

：

MEMS Inertial Technology Research Center,Nanjing University of Sci.& Tech.,China

【出 处】

：

The 6th International Conference on Nanoscience and Technolo

【发表日期】

：

2015年期

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论文部分内容阅读

　　In order to improve the temperature stabilities of bias for silicon resonant accelerometer(SRA),a temperature measurement method to measure Temperature in package cavity was proposed based on chip integrated temperature resonator for SRA.

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