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Meter-Scale Plasma Production and Thin Film Deposition Process with Parallel Waveguide at 915 MHz Mi
【机 构】
：
Nagoya University, Furo-cho, Chikusa-ku, Nagoya, 464-8603, Japan
【出 处】
：
9th Asia-Pacific Conference on Plasma Science and Technology
【发表日期】
：
2008年1期
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