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  5. The Characterization and Thermal Stability of the CrAlN Films Deposited by Medium Frequency Reactive

The Characterization and Thermal Stability of the CrAlN Films Deposited by Medium Frequency Reactive

来源 :The 17th International Conference on Surface Modification of | 被引量 : 0次 | 上传用户：btly540205390
【作 者】
：
Yanhong Lv Hongxuan Li Li Ji Yongjun Wang Xiaohong Liu Huidi Zhou Jianmin Chen 
【机 构】
：
State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of
【出 处】
：
The 17th International Conference on Surface Modification of
【发表日期】
：
2011年3期
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