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5. Localized electrochemical mechanical polishing (ECMP) on amorphous Ni-P alloy using brush on cylinde

Localized electrochemical mechanical polishing (ECMP) on amorphous Ni-P alloy using brush on cylinde

来源 :The 60th Annual Meeting of The International Society of Elec | 被引量 : 0次 | 上传用户：xi19870623

【作 者】

：

P.Cojocaru F.Muscolino O.Citterio L.Magagnin 

【机 构】

：

Politecnico di Milano Via Mancinelli,7,20131 Milan ITALY

【出 处】

：

The 60th Annual Meeting of The International Society of Elec

【发表日期】

：

2009年8期

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