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5. Piezoelectric MEMS for Audio Signal Transduction,Microfluidic Management,Resonant Mass Sensing,and M

Piezoelectric MEMS for Audio Signal Transduction,Microfluidic Management,Resonant Mass Sensing,and M

来源 :2008 IEEE International Ultrasonics Symposium(IUS)(2008 IEEE | 被引量 : 0次 | 上传用户：lygzzm

【作 者】

：

Eun Kim 

【机 构】

：

University of Southern California, Electrical Engineering-Electrophysics, Los Angeles, CA, USA

【出 处】

：

2008 IEEE International Ultrasonics Symposium(IUS)(2008 IEEE

【发表日期】

：

2008年1期

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