Recently,the study of the doped Diamond like carbon (DLC) film prepared on the NiTi alloy has received considerable attention owing to its effective corrosion resistance,favorable wear resistance as well as good ability to limit the Ni+ ion release.The purpose of this paper is to investigate metals doping effects on micro-structural,mechanical and corrosive behavior of the DLC film.Ti and Zr doped DLC films were prepared on NiTi alloys by reactive magnetron sputtering combined with plasma source ion implantation (PSII) technology used to improve the coherent strength.The mechanical properties of the doped DLC films were investigated by means of nano-indentation technique,microscratch and frictional wear testing.The potentiodynamic polarization measurement was employed to value the corrosion resistance of DLC with Ti and Zr films in Hanks simulated body fluid.It was found that Ti-DLC films embraced higher nano-hardness,somewhat lower coefficient of friction and better corrosion resistance than Zr-DLC films.