喷墨打印超短沟道长度的柔性有机薄膜晶体管阵列

来源 :中国真空学会2016学术年会 | 被引量 : 0次 | 上传用户:dyx760126
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  基于喷墨打印的柔性有机薄膜晶体管由于受液滴大小及铺展的限制,器件的沟道长度一般为几十微米。为了实现超短沟道长度的有机薄膜晶体管器件,我们采用顶栅底接触的器件结构,PEDOT 500 作为源漏电极及栅电极,polymethylmethacrylate(PMMA)作为绝缘层,poly[3,6-bis(40-dodecyl[2,20]bithiophenyl-5-yl)-2,5-bis(2-hexyldecyl)-2,5-dihydropyrrolo[3,4-c]pyrrole-1,4-dione](PDQT)作为有源层材料,在柔性透明的polyethylene terephthalate(PET)衬底上旋涂一层polyvinyl alcohol(PVA)作为表面修饰层,PEDOT 液滴在PVA 表面存在三相线钉扎现象,通过调节打印的PEDOT 液滴间距,能够很好的控制PEDOT 电极形貌及线宽,设置合适的打印线间距,在3 cm×3 cm 的PET 衬底上得到了沟道长度为2 μm的10×20 有机薄膜晶体管阵列。
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