Investigation of an capacitive N2/Ar plasma by fluid simulation and experimental diagnosis

来源 :13th Asia-Pacific Conference on Plasma Science and Technolog | 被引量 : 0次 | 上传用户:hddyy
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  Nitrogen-argon mixtures have bean employed in an extensive range of material processing applications,as the Ar addition to N2 gas helps to generate stable plasmas easily.Although many efforts have been put on the investigation of N2/Ar discharge,the underlying physical and chemical mechanisms of the capacitive N2/Ar plasmas are not exactly clear.In this paper,the effects of the Ar content and the power on the plasma parameters in the capactive N2/Ar discharges are examined by using the self-consistent fluid model and experimental diagnostic method.
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