Aluminum-doped zinc oxides layers were grown using sputter deposition technology and etched in 0.5 % HCI to introduce a surface texture.Angular resolved scattering (ARS) measurements were performed to evaluate the resulting surface topography.A representative texture quality parameter was derived from the ARS measurements.This quality parameter value was related to the sputter deposition parameters.An approximately linear correlation facilitates a texture control by establishing a feedback control of the texture crucial deposition step.Furthermore,it is demonstrated that the ZnO:Al texture can be adapted to a reference texture based on the feedback control with angular resolved scattering measurement.Solar cell parameters are presented showing the significant improvement of 2.3 mA/cm2 of short-circuit current density of single-junction μc-Si:H solar cells after texture adaption using the feedback control.