High-power solid-state laser facilities have been developed for research in inertial confinement fusion(ICF) in the last few decades[1,2].In order to satisfy the engineering system requirements for optical system positioning, the facility must provide a stable platform to maintain beam alignment during a shot.Then.Finite element analysis has been used as a guide in the design of combined conventional facility and the optical structures[3].In order to obtain the better analysis results, building a better finite element(FE) model is necessary.