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Stucture and Mechanical Property of Si-B-C-N Hard Coatings Prepared by Muti-Target Magnetron Co-Sput
【机 构】
：
College of Physics and Electronic Information Science, Tianjin Normal University, Tianfin, China
【出 处】
：
The 11th International Workshop on Plasma-Based Ion Implanta
【发表日期】
：
2011年3期
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