化学溶液沉积法制备高介电常数氧化锆薄膜及其在低压驱动有机场效应晶体管中的应用研究

来源 :第五届全国柔性与印刷电子研讨会(FPEChina) | 被引量 : 0次 | 上传用户：fbhww

【摘要】

：

跟常规的场效应晶体管不同，有机场效应晶体管具有可柔性折叠、低成本大面积制备等优点，在近几年来得到飞速发展。在射频标签、传感器、平板显示等领域具有广阔的应用前景。目前主流的有机场效应晶体管通常采用SiO2作为栅介电层，但是SiO2的介电常数较低，导致了有机场效应晶体管器件的工作电压一般在数十伏。

【作者】

：

陆旭兵何文强刘俊明

【机构】

：

华南师范大学华南先进光电子研究院,广州 516000 南京大学物理学院,南京,210093

【出处】

：

第五届全国柔性与印刷电子研讨会(FPEChina)

【发表日期】

：

2015年3期

【关键词】

：

高K栅介质有机场效应晶体管化学溶液沉积法

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化学溶液沉积法制备高介电常数氧化锆薄膜及其在低压驱动有机场效应晶体管中的应用研究

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