Investigated on rotational and vibrational temperature of nitrogen gas and ion in dual frequency cap

来源 :9th Asia-Pacific Conference on Plasma Science and Technology | 被引量 : 0次 | 上传用户:elenganse
下载到本地 , 更方便阅读
声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架
论文部分内容阅读
  By using optical emission spectroscopy (OES), the vibrational and rotational temperatures of N(+2) and N2 in dual frequency (41/2 MHz) capacitively coupled plasma (CCP) discharges are investigated.The vibrational and rotational temperatures are measured based on the N2 first negative system and N2 second positive system overlapped molecular emission optical spectrum, using the method of comparing the measured and calculated spectra with a least-square procedure.
其他文献
会议
会议
  Dielectric barrier discharges have been successfully used to deposit large-area fluorocarbon (FC) films on various materials, such as paper, glass, and sili
会议
会议
会议
会议
会议
会议
会议