【摘 要】
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Piezoelectric MEMS resonators have long been explored in many applications such as wireless communication,chemical/biological sensing and microfluidic opera
【机 构】
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StateKeyLaboratoryofPrecisionMeasuringTechnologyandInstruments,TianjinUniversity,92WeijinRoad,Nankai
【出 处】
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The 14th International Conference on Microreactivity Technol
论文部分内容阅读
Piezoelectric MEMS resonators have long been explored in many applications such as wireless communication,chemical/biological sensing and microfluidic operation.Solid mounted resonator(SMR)is a Piezoelectric MEMS device in millimetre scale,which is able to generate GHz acoustic wave of varied power.In this report,we developed an acoustic microreactor which employed SMRs as platform for droplet scale reaction and hypersound(GHz bulk acoustic wave)as energy source to drive chemical conversion.First,we investigated the hypersound propagation in the liquid by using COMSOL simulation.Then,we shall show that droplet of varied solvents can be formed on the bulk acoustic wave devices after surface modification.Next,the resulting liquid droplet was irradiated by 1.56 GHz bulk acoustic waves in a home-made digital microreactor system.Droplet heating by acoustic viscous dampening into liquid was carefully investigated for several solvents with different properties.Droplet mixing by acoustic streaming was visualized and quantified with normal mixing index.In the end,we demonstrated that both chemical and biochemical reaction proceeded smoothly with hypersound irradiation at varied conditions and that online reaction monitoring was possible by measuring hypersound dissipation.
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