【摘 要】
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Background,Motivation and Objective Micromachined ultrasonic transducers(MUTs) are an emerging class of MEMS devices,which can be used in a wide variety of potential applications such as in gesture re
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Background,Motivation and Objective Micromachined ultrasonic transducers(MUTs) are an emerging class of MEMS devices,which can be used in a wide variety of potential applications such as in gesture recognition and range finding,in medical applications and in personal healthcare as well as in different types of sensors based on ultrasonics such as gas sensors.
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