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5. PRECISE AND NONDESTRUCTIVE CHARACTERIZATION OF ‘BURIED’ PERIODICNANO-STRUCTURE BY SYNCHROTRON RADIAT

PRECISE AND NONDESTRUCTIVE CHARACTERIZATION OF ‘BURIED’ PERIODICNANO-STRUCTURE BY SYNCHROTRON RADIAT

来源 :第十届国际高分子物理学术讨论会 | 被引量 : 0次 | 上传用户：wanyuequn

【作 者】

：

Takamichi Shinohara Daiki Murakami Taiki Hoshino 

【机 构】

：

Graduate School of Engineering,744 Motooka, Nishi-ku Fukuoka 819-0395, Japan;WPI-I 2CNER,744 Motooka

【出 处】

：

第十届国际高分子物理学术讨论会

【发表日期】

：

2012年7期

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