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The Fe/Cu nanometer-scale multilayers of nominal modulation wavelengths from 5 to 40 nm with altemating Fe and Cu sublayers thickness ratio 1:1 are deposited by direct current magnetron sputtering on Si(100) substrates.Microstructure and morphology of the muitilayers are examined by small angle/wide angle x-ray diffraction (SA/WAXRD) and cross-sectional transmission electron microscopy (XTEM).Residual stress in the multilayers is estimated by using profilometry.Hardness of the multilayers is measured by using nanoindentation.All the multilayers have Fe (110) and Cu (111) texture,and the grain sizes of the mulitlayers increase from 5 to 17 nm with the increase of the modulation wavelength from 5 to 40 nm,correspondingly.