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The novel frictional properties of hydrogenated DLC (Diamond-like Carbon) films have been reported for nearly ten years.But up to now,researchers still haven't known the exact mechanism resulting in the super-low frictional performance of hydrogenated DLC films.Especially they have little knowledge on the molecular configuration and structural properties of these kinds of films.In this paper,CH3 radicals are selected as source species to deposit DLC films on diamond (100) by molecular dynamics simulation.Different impact energies have been used to deposit films.Results show hydrogenated DLC films can be successfully obtained when impact energy is in an appropriate scope that is no less than 20 eV.The depositing orocesses involve imoinging diamond surface and bonding procedure.