论文部分内容阅读
Modulation in current density for metaln-SiC contact by inserting Al2O3 interfacial layer
【机 构】
：
ASIC&SystemStateKeyLab,SchoolofMicroelectronics,FudanUniversity,Shanghai200433,China
【出 处】
：
第一届国际ALD应用大会暨第二届中国ALD学术交流会
【发表日期】
：
2012年10期
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