Study of Infrared Imaging Detecting Unit Based on Pt Films

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户:gengxuetao
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The infrared imaging detecting technology has broad application prospects in military and civilian fields.The bolometer is one of mainstream uncooled infrared detectors,because it has advantages of light weight,wide dynamic range,excellent response linearity and without refrigeration and chopper which leads to low manufacturing cost.
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