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5. Characterization of Thin ScAlN Film based Natural Single-Phase Unidirectional SAW Transducers using

Characterization of Thin ScAlN Film based Natural Single-Phase Unidirectional SAW Transducers using

来源 :2015两岸超声技术与医学研讨会 | 被引量 : 0次 | 上传用户：qingfeng112233

【作 者】

：

Masayoshi Esashi Shuji Tanaka Abhay Kochhar Yasuo Yamamoto Akihiko Teshigahara Ken-ya Hashimoto 

【机 构】

：

Tohoku University, Japan

【出 处】

：

2015两岸超声技术与医学研讨会

【发表日期】

：

2015年期

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