A self-aligned process to fill up electrode gap based on the wet etching properties of Ge2Sb2Te5 for

来源 :The 6th International Conference on Nanoscience and Technolo | 被引量 : 0次 | 上传用户：zoujing0505

【摘要】

：

Ge2Sb2Te5(GST)phase change material is widely used in the study of Phase change random access memory(PRAM).Researches show if phase change material is confined to the electrode gap,the heating efficie

【作者】

：

Yaling Zhou Yingchun Fu Lina Wan Xiaofeng Wang Xiaodong Wang

【机构】

：

Institute of Semiconductors,Chinese Academy of Sciences,China

【出处】

：

The 6th International Conference on Nanoscience and Technolo

【发表日期】

：

2015年5期

【关键词】

：

PRAM GST corrosion rate physical states substrate

下载到本地 , 更方便阅读

下载此文赞助VIP

声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架

论文部分内容阅读

其他文献

Studies on the radioprotective effect of different-structure carbon nanomaterials

Exposure to ionizing radiation cause excessive production of free radicals,which attack the important biomolecules such as nucleic acid and proteins,leading to oxidative stress,DNA damage and cell apo

会议

carbon nanomaterialsionizing radiationradiation protectionfree radicals

A low-toxic and bioreducible polymeric nanocarrier for glutathione-mediated intracellular release of

As one of the main therapeutic methods toward cancers,chemotherapy can efficiently inhibit tumor growth in a large extent [1].However,it is usually restricted with the severe cytotoxicity of antineopl

会议

Cancer chemotherapyPolymeric nanocarrierBiosafetyBiodegradability

Estimation of the Desorption Energy of Water and Dichloromethane in MIL-53(Al)by DSC and ab-initio c

Desorption energy of water(H2O)and Dichloromethane(CH2Cl2)in a metal-organic framework,MIL-53(Al),were investigated by the combination of experimental(X-ray powder diffraction(XRD)and differential sca

会议

desorption energymetal-organic frameworkDSCDFT

Shape controlled Synthesis of Au@Cu2-XS Core@Shell Nanocrystals and their improved Photothermal effe

Strong optical absorption in the near-infrared(NIR)region and induced efficient photothermal ablation of cancer cells are challenging because of the requirement of high photothermal conversion efficie

会议

Au@Cu2-xSCore@shellNanocrystalsphotothermalSurface Plasmon Resonance (SPR)C

Nanostructured Catalysts for Hydrogenation of Aromatics

Design and preparation of efficient and greener catalytic systems for hydrogenation of benzene and other aromatics is an interesting topic in Green Chemistry and Green Carbon Science.[1] This task con

会议

HydrogenationAromaticsNanostructured CatalystsSynergistic EffectsGreen Chemi

Preparation and structural order analysis of silica nanorods with different aspect ratio

As a promising optical and biomedical material,nanostructured SiO2 have attracted significant attention during the past years.Considerable efforts have been devoted to the development of nano-SiO2 wit

会议

SiO2nanorodsstructural orderinfrared absorption

One-Pot Tandem Catalysis over Pd@MIL-101:Boosting Efficiency of Nitro Compound Hydrogenation by Coup

Aniline and its derivatives are important chemical raw materials with production of over 4,000,000 tons every year [1].The common route for their preparation is the reduction of the corresponding nitr

会议

TandemNitro compoundsAmmonia boranePalladiumMOFs

Pd@ZIF-8 with Different Spatial Distributions of Palladium Nanoparticles:Efficient Size-selective Ca

Zeolitic imidazolate frameworks(ZIFs)are a new subclass of porous metal-organic frameworks(MOFs)[1,2].Owing to their high porosity and large surface area,ZIFs have attracted growing attention in heter

会议

Zeolitic imidazolate frameworksPd@ZIF-8Spatial distributionAlkene hydrogenati

One Step Hydrothermal Synthesis of CeO2-ZrO2 Nanocomposites and Investigation of the Morphological E

Uniform cauliflower-like nano-balls of CeO2-ZrO2 composites were synthesized by a facile hydrothermal process using only urea as a mineralizer without any surfactant or template.

会议

CeO2-ZrO2compositeshydrothermal synthesisureacauliflower-like nano-balls

Solution-Processed Large-Area Nanocrystal Arrays of Metal-Organic Frameworks as Wearable,Ultrasensit

Electronic skin has attracted much research interest for applications in medical diagnostics,artificial intelligence,and bioimplant devices in recent years.

会议

CuTCNQelectronic skinsmetal-organic frameworksnanocrystalssolution processab

A self-aligned process to fill up electrode gap based on the wet etching properties of Ge2Sb2Te5 for

与本文相关的学术论文