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The crystallograpic structure and properties of Zirconium nitride (ZrN) films deposited on 304 stainless steel were investigated for substrates oriented parallel with and perpendicular to the Zirconium target.The ZrN films prepared with a parallel substrate were found to exhibit {311 } orientations.For perpendicular substrates,ZrN films exhibited strong {220} orientation.SEM results showed that the parallel ZrN films have muM-shaped droplets,and perpendicular orientation ZrN films have oval-shaped droplets.The thickness of ZrN films in parallel mode is 1/2 of that in perpendicular mode.Nanoinden-tation results showed the hardness of ZrN films in perpendicular mode is lower than that of parallel mode.Potentiodynamic scanning results showed the corrosion resistance of films in perpendicular mode is better than that of films in parallel mode.