Composite Lateral Electric Field Excited Piezoelectric Resonator

来源 :2015两岸超声技术与医学研讨会 | 被引量 : 0次 | 上传用户:qq11202365
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Background, Motivation and Objective Piezoelectric resonators with lateral electric field are widely used for development of biological and liquid sensors. However as before the problem of suppression of parasitic oscillations is relevant. For that the electrodes of the special form are used but their sizes depend on orientation and shear dimensions of plate. Other method which has been successfully realized for longitudinal wave is based on the deposition of the damping layer on the certain part of the resonator. But for liquid sensors the most preferable is shear acoustic wave without radiation loss. In the paper the lateral electric field excited resonator of shear acoustic wave based on the plate of 128 YX lithium niobate of thickness of 0.5 mm was developed.
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