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An integrated in-situ STM-ALD system for catalyst characterization
【机 构】
：
School of Materials Science and Engineering,Huazhong University of Science and Technology,1037 Luoyu
【出 处】
：
第一届国际ALD应用大会暨第二届中国ALD学术交流会
【发表日期】
：
2012年4期
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