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ALD growth of the non-polar ZnO thin films
【机 构】
：
Key Laboratory of Articial Micro-and Nano-structures of Ministry of Education,and Department of Phys
【出 处】
：
第一届国际ALD应用大会暨第二届中国ALD学术交流会
【发表日期】
：
2012年4期
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