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由于共焦扫描激光显微镜具有独特的纵向分辨能力和很高的横向分辨率，因此在生物组织的超分辨率三维成像和半导体器件检测等领域具有重要意义．影响共焦扫描激光显微镜成像特性的两个关键因素是分辨率和信噪比．对层析成像或三维成像来说，共们扫描显微镜的纵向分辨率显然是一
Because confocal scanning laser microscopy has unique vertical resolution and high lateral resolution, it is of great importance in the fields of super-resolution 3D imaging of biological tissues and detection of semiconductor devices. Two key factors that affect confocal scanning laser microscopy imaging are resolution and signal-to-noise. For tomography or 3D imaging, the longitudinal resolution of a total scanning microscope is obviously one