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5. A New Type of MEMS Accelerometer with Up-tuning Structure

A New Type of MEMS Accelerometer with Up-tuning Structure

来源 :第6届纳米操纵、制造与测量国际会议( the International Conference IEEE 3M-NANO | 被引量 : 0次 | 上传用户：lwl45789

【作 者】

：

Yixuan Guo Zhonghe Jin Jiehui Du Yidong Liu 

【机 构】

：

Micro-Satellite Research Center,Zhejiang University,Hangzhou,P.R.China

【出 处】

：

第6届纳米操纵、制造与测量国际会议( the International Conference IEEE 3M-NANO

【发表日期】

：

2016年5期

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