SUS Substrate Surface Oxidation by Using Dielectric Barrier Discharge

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户:FalyE981521
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Fuel Cell is used stacking metal or polymer substrate.This hydro property of substrate surface is very important.Usually,surface property is hydrophilic.
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