Resistive humidity sensor based on vanadium complex films

来源 :Journal of Semiconductors | 被引量 : 0次 | 上传用户:zn
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A resistive-type relative humidity (RH) sensor based on vanadium complex (VO_2(3-fl)) film is reported inthisstudy.Gold electrodes were deposited on the glass substrates in a co-planar structure.A thin film of vanadium complex was coated as a humidity-sensing material on the top of the pre-patterned electrodes.The humidity-sensing principle of the sensor was based on the conductivity change of coated sensing element upon adsorption/desorption of water vapor. The resistance of the humidity sensor measured at 1 kHz decreased linearly with increasing the humidity in the range of 35%–70% RH. The overall resistance of the sensor decreases 11 times. An equivalent circuit for the VO_2(3-fl) based resistive-type humidity sensor was developed. The properties of the sensor studied in this work make it beneficial for use in the instruments for environmental monitoring of humidity. A resistive-type relative humidity (RH) sensor based on vanadium complex (VO_2 (3-fl)) film is reported in publication. Gold electrodes were deposited on the glass substrates in a co-planar structure. A thin film of vanadium complex was coated as a humidity-sensing material on the top-of-the-pre-patterned electrodes. The humidity-sensing principle of the sensor was based on the conductivity change of coated sensing element upon adsorption / desorption of water vapor. The resistance of the humidity sensor measured at The overall resistance of the sensor decreases 11 times. An equivalent circuit for the VO_2 (3-fl) based resistive-type humidity sensor was developed. The properties of the sensor studied in this work make it beneficial for use in the instruments for environmental monitoring of humidity.
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