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介绍了一种同时利用椭偏仪和分光光度计精确测量薄膜光学常数的方法,并详细比较了该方法与使用单一椭偏仪拟合结果的可靠性.采用可变入射角光谱型椭偏仪(VASE)表征了250—1700nm波段辉光放电法沉积的类金刚石薄膜,研究发现当仅用椭偏参数拟合时,由于厚度与折射率、消光系数的强烈相关性,无法得到吸收薄膜光学常数的准确解.如果加入分光光度计测得的透射率同时拟合,得到的结果具有很好的惟一性.该方法无需设定色散模型即可快速拟合出理想的结果,特别适合于确定透明衬底上较薄吸收膜的光学常数.
A method for accurately measuring the optical constants of films by using both ellipsometer and spectrophotometer is introduced, and the reliability of the method is compared with that of single ellipsometer.Variable angle of incidence ellipsometry (VASE) was used to characterize the DLC film deposited by 250-1700 nm band glow discharge method. It was found that the optical constants of absorption film can not be obtained due to the strong correlation between thickness and refractive index and extinction coefficient Of the exact solution.If the simultaneous addition of the measured transmittance of the spectrophotometer, the result is very unique.The method can quickly fit the desired results without setting the dispersion model, especially for the determination of transparent The optical constants of the thinner absorbing films on the substrate.