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共光路外差干涉仪具有很高的分辨率,但因为安装、调试误差会产生非线性误差,影响系统的测量精度。着重分析了在共光路外差干涉仪中由激光光源的椭圆偏振化和沃拉斯顿棱镜的安装方位角误差同时存在的情况下,引起的频率混叠综合误差的大小及变化规律。结果发现其造成的非线性误差可达2.2nm,同时还发现两者造成的误差在某些情况下存在一定程度的相互抵消作用。讨论了提高测量系统精度的有效措施,对正确设计和调试激光外差测试系统、提高测量系统精度具有重要意义。
A total of optical heterodyne interferometer with high resolution, but because of installation, commissioning error will have a nonlinear error, affecting the measurement accuracy of the system. Focus on the analysis of the total optical path of the heterodyne interferometer by the laser light source ellipse polarization and Wollaston prism installation of azimuth error exist, the frequency of aliasing caused by the size of the integrated error and variation. The results show that the nonlinear error caused by it can reach 2.2 nm, and at the same time it is found that the errors caused by the two have a certain degree of offsetting effect in some cases. The effective measures to improve the accuracy of the measurement system are discussed, which is of great significance for the correct design and debugging of the laser heterodyne test system and the improvement of the measurement system accuracy.