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过去微波管一直用大块的金属和陶瓷元件制成,目前趋向于减轻飞机上用的管子的重量。重量轻以及造价低的要求为管子结构开辟了一条新途径,其中薄膜工艺占着较重要的地位。虽然微波管中薄膜线路的电气要求不同于半导体组合线路,可是工艺基本上是相似的。微波管的严格要求已经开创了对于普通的组合线路工业也感兴趣的薄膜技术。本文介绍若干最近发展起来的薄膜技术,并详细讨论这种工艺在微波管中的应用。主要内容有:(1)陶瓷涂镀薄膜慢波结构;(2)薄膜二次发射体;(3)利用半导体薄膜抑制管内的电子多次碰撞效应;(4)时效硬化和分散硬化的金属薄膜。
In the past, microwave tubes have been made of large pieces of metal and ceramic components and currently tend to reduce the weight of the tubes used on the aircraft. The light weight and low cost requirements open up a new avenue for tube construction, in which thin film technology accounts for a significant share of the market. Although the electrical requirements of thin-film circuits in microwave tubes are different from those of semiconductor integrated circuits, the process is basically similar. The stringent requirements of microwave tubes have pioneered thin-film technologies that are of interest to the general composite line industry. This article presents several recent developments in thin film technology and discusses in detail the application of this process in microwave tubes. The main contents are as follows: (1) the slow wave structure of the ceramic coated film; (2) the film secondary emitter; (3) the use of the semiconductor film to suppress the electron multiple collision effect in the tube; (4) the age-hardened and dispersion-hardened metal film .